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KMID : 0385520060190060535
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Analytical Science & Technology
2006 Volume.19 No. 6 p.535 ~ p.543
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Environmental Science : The progress in NF3 destruction efficiencies of electrically heated scrubbers
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Moon Dong-Min
Lee Jin-Bok
Lee Ji-Youn
Kim Dong-Hyun
Lee Suk-Hyun
Lee Myung-Gyu
Kim Jin-Seog
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Abstract
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KEYWORD
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destruction and removal effiency, electricaly heated scrubber, perfluorocompound, NF3, greenhouse gas, remote plasma source chamber
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